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BHT service solution 寶虹科技股份有限公司BHT service solution 寶虹科技股份有限公司
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  • 前段成熟製程設備
    • CVD
      • Centura
        • HDP-CVD
        • PECVD
        • SACVD
        • WCVD
      • Producer
    • PVD
      • Endura
        • AI Sputter
        • MOCVD
    • ETCH
      • Centura
        • Metal Etch
        • Oxide Etch
  • 後段製程設備
    • PE-ALD
    • PE-ALE
  • 自動檢測設備
    • 2D/3D AOI
    • Shower Head 3D Inspaction
  • 前端晶圓傳系統
    • EFEM
      • Multi LPMs
      • N2 EFEM
      • Standard 2~3 LPMs
    • VTM
      • Batch Type
      • Cluster Type
    • 工廠自動化軟體整合
  • 半導體零組件及備品
    • Repair
      • Cabies
      • PVB/VME
    • Spares
      • Process kits
        • Metal Parts
        • Ceramic
        • Quartz
      • Coating
        • Chemical Resistance
        • Plasma Resistance
      • Other
  • 電子級硫酸零廢解決方案

Standard 2~3 LPMs

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