BHT is a pioneer in mature semi-production process equipment engineering. In order to meet customers’ various needs in a timely and appropriate manner, constantly improves its service and innovative business cooperation modes.

BHT Can provide the below process Equipment:

HDP CVD Ultima
Wafer Size: 200mm Ultima / Ultima Plus / TE
Process: FSG / USG / STI / IMD

Centura CVD
 Wafer Size: 200mm / 300mm
Process:  Hybride / TEOS / SACVD / PECVD / WCVD

Endura PVD
Wafer Size: 200mm / 300mm
Process: Conventional PVD / MOCVD / Aluminum / Titanium /Cobalt / Copper / Nickel /Platinum / Gold

Producer CVD
Wafer Size: 200mm
Process:  Hybride / TEOS / SACVD / PECVD