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AMAT
MODIFICATION ASSY PCB CHAMBER SET INT
Seriplex Control Bus MUXADIO SPX MUXADIO210 (producer MF)
ASSY PCB Analog I/O Board
PCB ASSY CHAMBER TEMPERATURE MONITOR
OPTD DETECT BD
PCB ASSY EXPANDED SERIPLEX INTERCONNNECT
AMAT_0100-00244, Producer wafer slide detect signal
PCB ASSEMBLY TC AMP INTERLOCK 300Xz
I/O Expansion Board
Mainframe Seriplex Backplane Board
AMAT 200mm PCB , MEI BOARD P/N : 0190-00387
MODIFICATION ASSY PCB CHAMBER SET INT , P/N : 0015-00421
SPARE PARTS
AMAT_0020-24914_COVER RING SST 8″ 101 COVERAGE
AMAT_0020-22844_PEDESTAL SHIELD
AMAT_0200-00998_PEDESTAL RING, 8 INCH B101,AL ARC_SPRAY CER
AMAT_0200-35018_INSERT, QTZ EXHAUST
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