AMAT 0020-18367 SCREW SLOTTED PAN HD 8-32 X 0.15L MONE
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AMAT 0190-07679 CONTROL STATION INTERFACE SPECIFICATION
AMAT 0015-00421 / 0100-38033 CHAMBER SET INTERFACE BOARD
AMAT 0100-00372 I/O Expansion Board
PCB ASSY CHAMBER TEMPERATURE MONITOR
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